Type of presentation: Poster

ID-12-P-3004 Real time observations of collector droplet oscillations in scanning electron microscope

Kolíbal M.1,2, Vystavěl T.3, Šikola T.1,2
1Institute of Physical Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic , 2CEITEC BUT, Brno University of Technology, Technická 10, 61669 Brno, Czech Republic, 3FEI Company, Podnikatelská 6, Brno 612 00, Czech Republic
tomas.vystavel@fei.com

Semiconductor nanowires (NW) are intensively studied for their promising properties in nanoelectronics, photonics, gas and bio-sensing etc. The nanowire shape (cross-section, sidewalls’ orientation etc.) plays a major role in determining electrical transport or sensing properties of nanowire-based devices. The ability to fully control the nanowire morphology is, of course, based on our understanding of the growth process. In this respect, in-situ Transmission Electron Microscopy (TEM) studies have provided vital information [1] on this issue.
In our contribution, we will present our results on the vapor-liquid-solid (VLS) germanium nanowire growth by evaporation inside a SEM vacuum chamber. Compared to TEM, scanning electron microscopy (SEM) can give three-dimensional information of the growth scenario. As the group IV nanowires grown by evaporation are highly faceted, we will focus on effects where SEM can give substantial information. In particular, the initial formation of the growth interface between the droplet and the substrate is decisive on the nanowire orientation (see Figure 1). We will show that it is dependent on the evaporation rate and, hence, by this parameter one can control the growth orientation [2.3]. In another example, we will demonstrate that the droplet on top of a nanowire is not necessarily pinned to the growth interface. Instead, under certain growth conditions it slides down the sidewalls and then climbs up again to the top. Therefore, the growth interface is not planar, but dynamically changes (Figure 2), which results in very complex nanowire morphology [4].

References
[1] Ross F. M., Rep. Prog. Phys. 73 (2010) 114501.
[2] Kolíbal M., Vystavěl T., Novák L. et al., Applied Physics Letters 99 (2011) 143113.
[3] Kolíbal M., Kalousek R., Vystavěl T. et. al., Applied Physics Letters 100 (2012) 203102.
[4] Kolíbal M., Vystavěl T., Varga P., Šikola T., Nanoletters, accepted.


We acknowledge Libor Novák for technical help. This work was supported by the Grant Agency of the Czech Republic (P108/12/P699) and by European Regional Development Fund – (CEITEC - CZ.1.05/1.1.00/02.0068). M. K. acknowledges the support of FEI Company.

Fig. 1: a-c) Initial stage of Ge NW growth from eutectic Au-Ge droplet. The droplet gets filled with evaporated Ge atoms and its volume virtually increases as the excess Ge nucleation takes place at the droplet/substrate interface, c)  the droplet unpins from the substrate and dewetts the nanowire base (c-k, 3 minute steps). The scale bar is 200 nm.

Fig. 2: a) Sequence of SEM images taken during in-situ observationof Ge nanowire growth in the <111> direction on Ge(100) substrate at400°C. a), b) The droplet mostly resides on top facet, butalternatively the triple phase line, slides down and wets {111}-orientedsidewalls. The scale bar is 200 nm.