Off-axis electron holography [1] has been used for observing microscopic distributions of magnetic fields, electrostatic potentials and strains at nanoscale level and for aberration-corrected electron microscopy by detecting phase shifts of electron waves. An off-axis electron hologram is formed by overlapping an object wave transmitted through a sample with a reference wave passed through the reference area. The inherent problem with this method is that the distance D between the object and reference waves, or the hologram width W, is limited by the lateral coherence length R or by the brightness of the illuminating electron waves.
We solved this long-standing problem by developing split-illumination electron holography (SIEH). Experiments were performed using a 300-kV cold field emission transmission electron microscope (TEM) (HF-3300X, Hitachi High-Technologies Co.).
In our SIEH (Fig. 1), we can illuminate a sample by using two highly separated and yet coherent electron waves without reducing the density of electron and form high-contrast holograms at regions far from the sample edge. The separation distance D can be controlled by a condenser biprism in the illuminating system. The fringe spacing s and the width W of the hologram can be independently controlled as in double-biprism electron interferometry [2]. Using SIEH, a fringe contrast of 50% can be attained even if the object wave is as far as 17 μm from the reference wave in the sample plane [3].
Recently, in order to improve precision of phase measurement in SIEH, double condenser biprism type SIEH without Fresnel fringes was developed (Fig. 2) [4]. Since demanded phase shifts to be measured in nanoscale are becoming smaller and smaller, it is important to improve precision of phase measurements to broaden the applications of the off-axis electron holography. The developed methods are used for varieties of applications and will be used for revealing electromagnetic phenomena in atomic scale.
References:
[1] A. Tonomura, “Electron holography”, (Springer-Verlag, 1999).
[2] K. Harada et al., Appl. Phys. Lett. 84 (2004) 3229.
[3] T. Tanigaki et al., Appl. Phys. Lett. 101 (2012) 043101.
[4] T. Tanigaki et al., Ultramicroscopy 137 (2014) 7.
The authors are grateful to the late A. Tonomura for his valuable discussions. This research was supported by a grant from JSPS through the “FIRST Program”, initiated by CSTP.